UV Ozone Cleaning Systems
Product Comparison
The UVOCS T10X10/OES and T16X16/OES are laboratory-grade UV/ozone surface-cleaning systems designed primarily to remove extremely small amounts of organic contamination from surfaces. They’re particularly common in semiconductor, thin-film, optics, materials science, MEMS, and research environments.
These UV ozone cleaning systems provide a fast, dry, room-temperature method for achieving ultra-clean surfaces by using ultraviolet light and ozone to break down organic contaminants. The process can remove trace amounts of oil, grease, solder flux, residual photoresist, adhesive residues, carbon contamination, and other organic materials, making UV/ozone cleaning an effective final cleaning and surface-preparation step for demanding applications.
| UVOCS® | MODEL | MODEL |
|---|---|---|
| Model Number | T10X10/OES | T16X16/OES |
| Source Size | 10” x 10” (25.4 cm x 25.4cm) | 16” x 16” (40.64 cm x 40.64 cm) |
| Active Area | 100 sq. in. (254 sq. cm) | 256 sq. in. (650.24 sq. cm) |
| Width | 14” (35.56 cm) | 20” (50.8 cm) |
| Depth | 23.75” (60.325 cm) | 29.75” (75.565 cm) |
| Height | 14.5” (36.83 cm) | 14.5” (36.83 cm) |
| Depth -Tray Out | 33” (83.82 cm) | 46” (116.84 cm) |
| Sliding Trays | 1 | 1 |
| Construction | Cabinets and Trays: Stainless Steel | Cabinets and Trays: Stainless Steel |
| Power Requirements | 120V, 60Hz 3.0 amp Max 230V, 50Hz 1.6 amp Max | 120V, 60Hz 5.0 amp Max 230V, 50Hz 2.5 amp Max |
| Ozone Exhaust Shroud | Yes | Yes |
| Exhaust Port Opening | 3” (7.62 cm) Diameter | 3” (7.62 cm) Diameter |
| Required Exhaust (at equipment - fan not supplied) | 100 cfm | 100 cfm |
| Timer | 0-999 seconds / minutes / hours | 0-999 seconds / minutes / hours |
| Audible End-of-Cycle Beeper | Yes | Yes |
| UV “ON” Indicator | Yes | Yes |
