UV Ozone Cleaning Systems

Product Comparison

UVOCS product
Model 10” x 10” / OES Shown

The UVOCS T10X10/OES and T16X16/OES are laboratory-grade UV/ozone surface-cleaning systems designed primarily to remove extremely small amounts of organic contamination from surfaces. They’re particularly common in semiconductor, thin-film, optics, materials science, MEMS, and research environments.

These UV ozone cleaning systems provide a fast, dry, room-temperature method for achieving ultra-clean surfaces by using ultraviolet light and ozone to break down organic contaminants. The process can remove trace amounts of oil, grease, solder flux, residual photoresist, adhesive residues, carbon contamination, and other organic materials, making UV/ozone cleaning an effective final cleaning and surface-preparation step for demanding applications.

UVOCS®MODELMODEL
Model NumberT10X10/OEST16X16/OES
Source Size10” x 10” (25.4 cm x 25.4cm)16” x 16” (40.64 cm x 40.64 cm)
Active Area100 sq. in. (254 sq. cm)256 sq. in. (650.24 sq. cm)
Width14” (35.56 cm)20” (50.8 cm)
Depth23.75” (60.325 cm)29.75” (75.565 cm)
Height14.5” (36.83 cm)14.5” (36.83 cm)
Depth -Tray Out33” (83.82 cm)46” (116.84 cm)
Sliding Trays11
ConstructionCabinets and Trays: Stainless SteelCabinets and Trays: Stainless Steel
Power Requirements120V, 60Hz 3.0 amp Max
230V, 50Hz 1.6 amp Max
120V, 60Hz 5.0 amp Max
230V, 50Hz 2.5 amp Max
Ozone Exhaust ShroudYesYes
Exhaust Port Opening3” (7.62 cm) Diameter 3” (7.62 cm) Diameter
Required Exhaust (at equipment - fan not supplied)100 cfm100 cfm
Timer0-999 seconds / minutes / hours 0-999 seconds / minutes / hours
Audible End-of-Cycle BeeperYesYes
UV “ON” IndicatorYesYes